Back to results
US 6,639,417 B2Granted
Semiconductor parametric testing apparatus
AssigneeAgilent Technologies, Inc.
InventorTakayuki Takao
Life of this patent
Estimating the term…
Abstract
A semiconductor parametric testing apparatus includes designating a die and module on each wafer at which a test should be paused and pausing a test at the preselected die and module on each wafer.
Claims5
A semiconductor parametric testing apparatus comprising:
- a tester body for performing a test of a wafer comprising a plurality of dice having a module, said tester body comprising a probe for contacting said module and providing an electric signal to said probe, measuring an electric signal from said module by said probe, and outputting measured data;
- a wafer probe for taking said wafer from a wafer lot and for positioning said probe on said module;
- a computer, including a display, for processing said measured data and for controlling said tester body and wafer prober;
- a measuring program executed by said computer having a test shell comprising:
- a test plan describing an attribute of said test;
- a framework comprising a program of a process for testing and a user interface displayed at least at a time of performing said test, said user interface including an operation panel for designating a predetermined module for which said test is automatically paused, said operation panel comprising;
- a die list of at least one die attribute for selection;
- a wafer map displaying dice for selection, said displayed dice having a die attribute selected from said die list, and
- a module list of a module of one of said dice selected from said wafer map.
6 more elements
Dependencies are inferred from the claim text.