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US 6,639,415 B2Granted
Probe station having multiple enclosures
AssigneeCascade Microtech, Inc.
InventorsRon A. Peters, Leonard A. Hayden, Jeffrey A. Hawkins, R. Mark Dougherty
Life of this patent
Estimating the term…
Abstract
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.
Claims3
A probe station for probing a test device, said probe station comprising:
- (a) a chuck having a surface for supporting said test device;
- (b) an electrically conductive inner member electrically isolated from, and at least partially enclosing said surface;
- (c) an electrically conductive outer member electrically isolated from, and at least partially enclosing said surface;
- (d) a selector member having a first position and a second position, said first position electrically interconnecting said inner member with said outer member and said second position electrically isolating said inner member from said outer member.
1 more element
Dependencies are inferred from the claim text.