Charged particle measuring device and measuring method thereof

A charged particle measuring device comprising a measuring chamber, the measuring chamber comprising:

• a semiconductor detector;
• a sample placed so as to oppose to the semiconductor detector;
• a radiation measuring circuit which includes a shield shutter that is arranged between the semiconductor detector and the sample and shields charged particles incident from the sample during background measurement, and is connected to the semiconductor detector to perform a spectrum analysis;
• a charged particle emission amount measuring device which performs quantitative analysis of charged particles with an output signal of the radiation measuring circuit;
• a display unit for displaying analysis result of the charged particle emission amount measuring device;
• and an evacuation apparatus and a gas replacement apparatus, which are connected through an exhaust pipe communicating with the inside of the measuring chamber.

A charged particle measuring method comprising the steps of:

• arranging a sample tray for placing a sample so as to oppose to a semiconductor detector in a measuring chamber having a sealable door which can be opened and closed;
• performing several times of cycle purge with a pure gas by an evacuation apparatus and a gas replacement apparatus which are connected through an exhaust pipe which communicates with the inside of the measuring chamber;
• measuring a charged particle emission amount to set as a background measurement using a radiation measuring circuit which includes a preamplifier, a linear amplifier, and a pulse height analyzer that are connected to the semiconductor detector, and a charged particle emission amount arithmetic unit for performing quantitative analysis of charged particle with an output signal from the radiation measuring circuit;
• and calculating a charged particle emission amount value which is obtained by subtracting the background measurement from the charged particle emission amount measurement obtained by measuring a charged particle emission amount after placing the sample on the sample tray and performing several times of cycle purge with a pure gas.

A charged particle measuring method comprising the steps of:

• arranging a sample so as to oppose to a semiconductor detector in a measuring chamber;
• shielding charged particles incident from the sample by a shield shutter between the semiconductor detector and the sample, performing several times of cycle purge with a pure gas by an evacuation apparatus and a gas replacement apparatus which are connected through an exhaust pipe which communicates with the inside of the measuring chamber;
• measuring a charged particle emission amount and setting the same as background measurement value using a radiation measuring circuit which is connected with the semiconductor detector and performs spectrum analysis, and a charged particle emission amount measuring device which performs quantitative analysis of charged particles with an output signal of the radiation measuring circuit;
• and calculating a charged particle emission amount value which is obtained by subtracting the background measurement from the charged particle emission amount measurement obtained by measuring a charged particle emission amount, incident from the test sample, by opening the shield shutter.