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US 6,639,339 B1Granted
Capacitive ultrasound transducer
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorJonathan J. Bernstein
Life of this patent
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Abstract
A capacitive ultrasound transducer including a dielectric diaphragm with an electrode; a porous layer; and a spacer structure between the diaphragm and porous layer for defining a capacitive gap between them; the pores of the porous layer providing a compliant reservoir for the fluid in the gap.
Claims29
A capacitive ultrasound transducer comprising:
- a dielectric diaphragm with an electrode;
- a porous layer;
- and a spacer structure between said diaphragm and porous layer for defining a capacitive gap between them;
- the pores of said porous layer providing a compliant reservoir for the fluid in the gap.
1 more element
A capacitive ultrasound transducer comprising:
- a semi-insulating diaphragm having a doped conductive region forming an electrode;
- a second layer;
- and a spacer structure between said diaphragm and second layer for defining a capacitive gap between them.
Dependencies are inferred from the claim text.