Linear motor stage system for use in exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorsShigeto Kamata, Toshio Matsuki
Life of this patent
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Abstract
A linear motor includes a magnet, a coil, and a jacket having an inside member that is comb-shaped having teeth, extending along a driving direction. The coil is engaged by the teeth of the comb-shaped member. A cooling medium flows through an inside space enclosed by the jacket. Unwanted deformation or breakage of the jacket can be avoided even if the pressure of the cooling medium is enlarged or the thickness of a small-thickness portion of the jacket is made smaller. A higher cooling efficiency is thus attainable by increasing the flow rate of the cooling medium.
Claims22
A linear motor, comprising:
- a magnet;
- a plurality of coils;
- and
- a jacket having a comb-shaped member that extends along a driving direction, wherein a cooling medium flows through an inside space enclosed by said jacket, wherein said comb-shaped member includes base portions provided on inside faces of said jacket and pillar-like portions for connecting said base portions, and wherein at least one of said plurality of coils is supported by said base portions in a floating manner and is fixed, with respect to the driving direction, by being sandwiched by the pillar-like portions,
- wherein said a plurality of coils are arrayed along the driving direction partially overlapping each other wherein at least one of said coils has a bent end portion to avoid mutual interference of partially overlapped portions of said coils and wherein said coils are disposed with their central portions placed substantially at the same level, and
- wherein said jacket has a central portion and a recessed portion on the outside of the central portion, wherein the bent end portions of said coils are disposed at the recessed portion, and wherein the recessed portion reinforces the central portion.
A linear motor comprising:
- a magnet;
- a coil;
- and
- a jacket having a comb-shaped member that extends along a driving direction, wherein a cooling medium flows through an inside space enclosed by said jacket, wherein said comb-shaped member includes base portions provided on inside faces of said jacket and pillar-like portions for connecting said base portions, and wherein said coil is supported by said base portions in a floating manner and is fixed, with respect to the driving direction, by being sandwiched by the pillar-like portions,
- wherein said jacket has a reinforcement portion extending parallel to the driving direction, and
- wherein said reinforcement portion is formed on an outside face of said jacket.
A linear motor comprising:
- a magnet;
- a coil;
- and
- a jacket having a comb-shaped member that extends along a driving direction, wherein a cooling medium flows through an inside space enclosed by said jacket, wherein said comb-shaped member includes base portions provided on inside faces of said jacket and pillar-like portions for connecting said base portions, and wherein said coil is supported by said base portions in a floating manner and is fixed, with respect to the driving direction, by being sandwiched by the pillar-like portions,
- wherein said jacket has a reinforcement portion extending parallel to the driving direction, and
- wherein at least one of an upper half and a lower half of a section of said jacket taken along a plane perpendicular to the driving direction has a recessed portion.
A linear motor, comprising:
- a magnet;
- a plurality of coils;
- and
- a coil holding member having recessed portions and pillar portions, in a comb-shape, disposed along a first direction, wherein each coil is supported, with respect to a second direction perpendicular to the first direction, by the recessed portions and is fixed, with respect to the first direction, by being sandwiched by the pillar portions, the pillar portions being disposed along an outside periphery of said coils.
Dependencies are inferred from the claim text.