Microelectromechanic relay and method for the production thereof
AssigneeTyco Electronics Logistics AG
InventorsHelmut Schlaak, Martin Hanke
Life of this patent
Estimating the term…
Abstract
The invention relates to a relay, especially a miniaturized electrostatic relay, comprising a bridge-type make contact. The contact spring is designed as a torsion spring that is linked with a switching spring (3) via multiply bent spring parts (7). It is thus possible in particular to compensate fixed contacts (2) of different heights. The invention further relates to a method for producing the relay as a micro-mechanical electrostatic relay.
Claims20
A relay, comprising:
- a base member having two fixed contacts,
- a switching spring attached by way of an edge portion along a mounting line, said switching spring being movable between open and closed positions and having a contact spring,
- a movable contact arranged on the contact spring and bridging the fixed contacts in the closed position of the switching spring,
- a drive member moving the switching spring and the contact spring between said open and closed positions,
- wherein said contact spring is designed as torsion spring that is rotatable about an axis of rotation arranged centrally and perpendicularly to the connecting line between the fixed contacts and located in the plane of the contact spring.
A relay comprising a base member having two fixed contacts, where a switching spring is attached by way of an edge portion along a mounting line, said switching spring having a contact spring and being movable between open and closed positions, a movable contact arranged on the contact spring and bridging the fixed contacts in the closed position of the switching spring, a drive member moving the switching spring and the contact spring between said open and closed positions, said contact spring being profiled as a torsion spring linked to said switching spring via multiply bent spring sections.
A relay comprising a base member having two fixed contacts, where a switching spring is attached by way of an edge portion along a mounting line, said switching spring having a contact spring, and said switching spring being movable between open and closed positions, a movable contact arranged on the contact spring and bridging the fixed contacts in the closed position of the switching spring, a drive member moving the switching spring and the contact spring between said open and closed positions, said contact spring having torsion spring means for compensating said contact spring to various heights of said fixed contacts.
A method of making a relay, having a base member having two fixed contacts, a switching spring which is movable between open and closed positions and having a contact spring, a movable contact arranged on the contact spring and bridging the fixed contacts in the closed position of the switching spring, and a drive member comprising a first electrode arranged on the side of the switching spring facing the base member, and a second electrode arranged on the base member opposite the first electrode, the method of comprising the steps of:
- a) depositing the second electrode, an overlying insulating layer and the fixed contacts on a base substrate constituting the base member,
- b) bonding a silicon wafer, having a doped silicon layer on the side of the wafer facing the base substrate, onto the base substrate, and
- c) patterning the doped silicon layer to form the switching spring and the contact spring.
Dependencies are inferred from the claim text.