Semiconductor device and its manufacturing method
AssigneesHitachi, Ltd., Hitachi ULSI Systems Co., Ltd., Akita Electronics Co., Ltd.
InventorsYukiharu Akiyama, Tomoaki Kudaishi, Takehiro Ohnishi, Noriou Shimada, Shuji Eguchi, Asao Nishimura, Ichiro Anjo, Kunihiro Tsubosaki, Chuichi Miyazaki, Hiroshi Koyama, Masanori Shibamoto, Akira Nagai, Masahiko Ogino
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