Multi-layer inductor formed in a semiconductor substrate
AssigneeAgere Systems Inc.
InventorsSamir Chaudhry, Paul Arthur Layman, J. Ross Thomson, Mohamed Laradji, Michelle D. Griglione
Life of this patent
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AssigneeAgere Systems Inc.
InventorsSamir Chaudhry, Paul Arthur Layman, J. Ross Thomson, Mohamed Laradji, Michelle D. Griglione
Estimating the term…
A thin-film multi-layer high Q inductor spanning at least three metal layers is formed by forming a plurality of parallel first metal runners on the semiconductor substrate. A plurality of first and second vertical conductive vias are formed in electrical communications with each end of the plurality of metal runners. A plurality of third and fourth conductive vias are formed over the plurality of first and second conductive vias and a plurality of second metal runners are formed interconnecting the plurality of third and fourth conductive vias. The plurality of first metal runners are in a different vertical than the plurality of second metal runners such that the planes intersect. Thus one end of a first metal runner is connected to an overlying end of a second metal runner by way of the first and third vertical conductive vias. The other end of the second metal runner is connected to the next metal one runner by way of the second and fourth vertical conductive vias., forming a continuously conductive structure having a generally helical shape.
An integrated circuit inductor structure comprising:
A multi-level integrated circuit inductor structure, comprising:
Dependencies are inferred from the claim text.