Optically controlled MEM switches
AssigneeHRL Laboratories, LLC
InventorsTsung-Yuan Hsu, Robert Y. Loo, Greg Tangonan, Juan F. Lam
Life of this patent
Estimating the term…
Abstract
An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
Claims9
An optically controlled mechanical switch actuated by electrostatic forces, the switch comprising:
- electrostatic plates disposed on opposing portions of the switch;
- and
- a photoelectric element arranged to affect charge reaching said electrostatic plates such that the switch is caused to actuate to a first position when the photoelectric element is exposed to a first level of illumination and to a second position when the photoelectric element is exposed to a different second level of illumination.
Dependencies are inferred from the claim text.