Spot grid array imaging system

An imager comprising:

• an illumination source comprising a broadband lamp, for simultaneously illuminating an array of spots spaced apart from each other on a surface of an object to be imaged;
• a detector array for collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the illuminated portions of the object surface, the detector array comprising a plurality of pixel arrays, each pixel array corresponding to one of the spots;
• and
• a movable stage for supporting the object and moving the object such that a predetermined portion of the surface of the object can be illuminated and imaged;
• wherein the illumination source is for illuminating the array of spots such that the signal from each spot is collected by more than one pixel of one of the pixel arrays at a time.

An imager comprising:

• a radiation source for simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• a detector array for collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• and
• a movable stage for supporting the object and moving the object such that a predetermined portion of the surface of the object can be irradiated and imaged;
• wherein the movable stage is for moving the object substantially linearly in a scanning direction that deviates from an axis of the spot array such that as the object is moved a distance substantially equal to a length of the spot array in the scanning direction, the spots trace a substantially continuous path on the object surface in a mechanical cross-scan direction;
• and
• wherein the spot array comprises a plurality of rows and columns of spots, and the radiation source is for irradiating a predetermined number of rows of spots such that the spots of two adjacent ones of the columns overlap as they trace the substantially continuous path on the object surface.

An inspection system comprising:

• a radiation source for simultaneously irradiating a first array of spots spaced apart from each other on a surface of a first object to be imaged and irradiating a second array of spots spaced apart from each other on a surface of a second object to be imaged, wherein the first and second spot arrays are substantially identical, and the surfaces of the first and second objects correspond to each other;
• a first detector array for collecting signals resulting from the interaction of the spots with the surface of the first object to form an image of the irradiated portions of the first object surface;
• a second detector array for collecting signals resulting from the interaction of the spots with the surface of the second object to form an image of the irradiated portions of the second object surface;
• a movable stage for supporting the first and second objects and moving the objects such that substantially the entire surface of each object can be irradiated and imaged;
• and
• a processor for comparing the images of the first and second objects.

A method comprising the steps of:

• simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• moving the object on a movable stage while the irradiating and collecting steps are being performed, such that a predetermined portion of the surface of the object can be irradiated and imaged;
• and
• compensating for mechanical inaccuracies in the movable stage.

A method comprising the steps of:

• simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• focusing light from a light source into the array of spots on the surface of the object using an array of lenses;
• placing a member having an array of pin-holes corresponding to the lenses of the array in a conjugate image plane between the object and the detector array such that the pinholes are concentric with the spots of the spot array;
• and
• moving the object on a movable stage such that a predetermined portion of the surface of the object can be irradiated and imaged.

A method comprising the steps of:

• simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• focusing light from a light source into the array of spots on the surface of the object using an array of lenses;
• collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface at a detector array;
• splitting a conjugate plane of a back pupil of the lens array into a plurality of conjugate pupil planes;
• forming a conjugate image plane for each pupil plane;
• placing a plurality of members, each member having a pin-hole array and associated with one of the image planes, such that each member has a different lateral shift;
• collecting signals resulting from the interaction of the spots with the surface of the object to simultaneously generate a plurality of images of the irradiated portions of the object, each image associated with one of the members for receiving light from the pin hole array;
• moving the object on a movable stage such that a predetermined portion of the surface of the object can be irradiated and imaged;
• and
• compensating for mechanical inaccuracies in the moving stage.

A method comprising the steps of:

• simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• focusing light from a light source into the array of spots on the surface of the object using an array of lenses;
• placing a member having an array of masks corresponding to the centers of the lenses of the array in a conjugate image plane between the object and the detector array such that the masks are concentric with the spots of the spot array;
• and
• moving the object on a movable stage such that a predetermined portion of the surface of the object can be irradiated and imaged.

A method comprising:

• simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• and
• supporting the object and moving the object substantially linearly in a scanning direction that deviates from an axis of the spot array such that as the object is moved a distance substantially equal to a length of the spot array in the scanning direction, the spots trace a substantially continuous path on the object surface in a mechanical cross-scan direction, and a predetermined portion of the surface of the object is irradiated and imaged;
• wherein the spot array comprises a plurality of rows and columns of spots, and the irradiating step comprises irradiating a predetermined number of rows of spots such that the spots of two adjacent ones of the columns overlap as they trace the continuous path on the object surface.

A method comprising:

• simultaneously irradiating a first array of spots spaced apart from each other on a surface of a first object to be imaged and irradiating a second array of spots spaced apart from each other on a surface of a second object to be imaged, wherein the first and second spot arrays are substantially identical, and the surfaces of the first and second objects correspond to each other;
• collecting signals resulting from the interaction of the spots with the surface of the first object to form an image of the irradiated portions of the first object surface;
• collecting signals resulting from the interaction of the spots with the surface of the second object to form an image of the irradiated portions of the second object surface;
• moving the first and second objects on a movable stage such that a predetermined portion of the surface of each object can be irradiated and imaged;
• and
• comparing the images of the first and second objects.

A method comprising the steps of:

• simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• collecting signals resulting from the interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• and
• moving the object on a movable stage substantially linearly in a scanning direction that deviates from an axis of the spot array such that as the object is moved a distance substantially equal to a length of the spot array in the scanning direction, the spots trace a substantially continuous path on the object surface in a mechanical cross-scan direction while the irradiating and collecting steps are being performed, such that a predetermined portion of the surface of the object can be irradiated and imaged;
• wherein the spot array comprises a plurality of rows and columns of spots, and the irradiating step comprises irradiating a predetermined number of rows of spots such that the spots of two adjacent ones of the columns overlap as they trace the continuous path on the object surface.

A method comprising the steps of:

• simultaneously focusing light from a light source into an array of spots spaced apart from each other on a surface of an object to be imaged;
• reflecting a first portion of the light from the light source from the array of spots at a first angle to a first detector array for collecting signals resulting from the interaction of the spots with the surface of the object to form a first image of the irradiated portions of the object surface;
• and
• reflecting a second portion of the light from the light source at a second angle different from the first angle to a second detector array for collecting signals resulting from the interaction of the spots with the surface of the object to form a second image of the irradiated portions of the object surface;
• and
• moving the object on a movable stage while the irradiating and collecting steps are being performed, such that a predetermined portion of the surface of the object can be irradiated and imaged.

An imager comprising:

• a radiation source for simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• a detector array for collecting signals resulting from an interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• a movable stage for supporting the object and moving the object such that a predetermined portion of the surface of the object can be irradiated and imaged;
• a first member having an array of pin-holes corresponding to the centers of the spots of the array, the first member being disposed between the object and the detector array such that the pinholes are concentric with the spots;
• and
• a second member having an array of masks corresponding to the centers of the spots of the array, the second member being disposed between the radiation source and the surface of the object such that the masks are concentric with the spots of the spot array.

An imager comprising:

• a radiation source for simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• a detector array for collecting signals resulting from an interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface;
• a movable stage for supporting the object and moving the object such that a predetermined portion of the surface of the object can be irradiated and imaged;
• and
• a first member having an array of masks corresponding to the centers of the spots of the array, the first member being disposed between the object and the detector array such that the masks are concentric with the spots.

An imager comprising:

• a light source for simultaneously irradiating an array of spots spaced apart from each other on a surface of an object to be imaged;
• an array of lenses for focusing light from the light source into the array of spots;
• a first detector array for collecting signals resulting from an interaction of the spots with the surface of the object to form an image of the irradiated portions of the object surface, wherein a first portion of the light from the light source is reflected from the array of spots at a first angle to the first detector array, and a second portion of the light from the light source is reflected at a second angle different from the first angle;
• a second detector array for collecting signals corresponding to the second portion of the light;
• and
• a movable stage for supporting the object and moving the object such that a predetermined portion of the surface of the object can be irradiated and imaged.