US 6,639,036 B2 · Acid-labile polymer and resist composition

Abstract

A chemically amplified resist composition consists of an acid generating agent, additive, solvent and a copolymer represented by the following formula: where R1, R2 and R6 are independent of each other and respectively include a hydrogen atom or an alkyl, alkoxymethylene, alkoxyethylene, phenyl, alkoxyalkylene, alkylphenyl, alkoxyphenyl, allyl, benzyl, alkylbenzyl, alkoxybenzyl containing 1 to 34 carbon atoms having or not having an hydroxy, ether, ester, carbonyl, acetal, epoxy, nitrile or aldehyde; R5 is a hydrogen atom, an alkyl or alkoxy group containing 1 to 18 carbon atoms; R7 is a hydrogen atom, an alkyl group containing 1 to 18 carbon atoms, an alkyl group containing alkoxy 1 to 18 carbon atoms or an alkyl group containing ester of 1 to 18 carbon atoms; R3 and R4 are independent and respectively include a hydrogen atom, hydroxy, nitrile, aldehyde, hydroxymethylene, and alkylcarbonyloxy, alky, hydroxyalkylene, alkoxycarbonyl, alkoxymethylene or alkoxyalkanyl group containing 1 to 18 carbon atoms; X is olefin derivatives, vinyl ether derivatives or styrene derivatives containing 1 to 40 carbon atoms, alternatively these derivatives may be comprised of hydroxy, ester, alkoxyalkyloxycarbonyl, ketone or ether; a, b, c, d, e and f are a number represented a repeating unit in the main chain, wherein a+b+c+d+e+f=1, the content of a and b are 0 to 0.7, respectively, (a+b)/(a+b+c+d+e+f)>0.3, and the content of c, d, e and f are 0 to 0.9, respectively; and n is an integer of 0 or 1.

Claims9

Dependent claims

An acid-labile polymer represented by following formula 1:

where R1, R2 and R6 are independent of each other and respectively include a hydrogen atom or an alkyl, alkoxymethylene, alkoxyethylene, phenyl, alkoxyalkylene, alkylphenyl, alkoxyphenyl, allyl, benzyl, alkylbenzyl, alkoxybenzyl containing 1 to 34 carbon atoms having or not having an hydroxy, ether, ester, carbonyl, acetal, epoxy, nitrile or aldehyde;
R2 is alkoxyalkylene group represented by following formula 2:
wherein R8 is Hydrogen atom or alkyl group containing C1 to C33 having linear, branched and cyclic group, and R9 is alkyl group containing C1 to C33 having linear, branched and cyclic group;
R5 is a hydrogen atom, an alkyl or alkoxy group containing 1 to 18 carbon atoms;
R7 is a hydrogen atom, an alkyl group containing 1 to 18 carbon atoms, an alkyl group containing alkoxy 1 to 18 carbon atoms or an alkyl group containing ester of 1 to 18 carbon atoms;
R3 and R4 are independent and include a hydrogen atom, hydroxy, nitrile, aldehyde, hydroxymethylene, and alkylcarbonyloxy, alkyl, hydroxyalkylene, alkoxycarbonyl, alkoxymethylene or alkoxyalkanyl group containing 1 to 18 carbon atoms;
X is olefin derivatives, vinyl ether derivatives or styrene derivatives containing 1 to 40 carbon atoms, alternatively these derivatives may be comprised of hydroxy, ester, alkoxyalkyloxycarbonyl, ketone or ether;
a, b, c, d, e and f are each a number representing a repeating unit in the main chain, wherein a+b+c+d+e+f=1, the content of a and b is 0.1 to 0.7, respectively, (a+b)/(a+b+c+d+e+f)≧0.3, the content of c is 0.1 to 0.9, and the content of d, e and f is 0 to 0.9, respectively;
and n is an integer of 0 or 1.

6 more elements

A chemically amplified resist composition that consists of 100 parts by weight of at least one polymer selected from the groups represented by the following formula, acid generating agent, additive and solvent,

where R1, R2 and R6 are independent of each other and respectively include a hydrogen atom or an alkyl, alkoxymethylene, alkoxyethylene, phenyl, alkoxyalkylene, alkylphenyl, alkoxyphenyl, allyl, benzyl, alkylbenzyl, alkoxybenzyl containing 1 to 34 carbon atoms having or not having an hydroxy, ether, ester, carbonyl, acetal, epoxy, nitrile or aldehyde;
R5 is a hydrogen atom, an alkyl or alkoxy group containing 1 to 18 carbon atoms;
R7 is a hydrogen atom, an alkyl group containing 1 to 18 carbon atoms, an alkyl group containing alkoxy 1 to 18 carbon atoms or an alkyl group containing ester of 1 to 18 carbon atoms;
R3 and R4 are independent and include a hydrogen atom, hydroxy, nitrile, aldehyde, hydroxymethylene, and alkylcarbonyloxy, alkyl, hydroxyalkylene, alkoxycarbonyl, alkoxymethylene or alkoxyalkanyl group containing 1 to 18 carbon atoms;
X is olefin derivatives, vinyl ether derivatives or styrene derivatives containing 1 to 40 carbon atoms, alternatively these derivatives may be comprised of hydroxy, ester, alkoxyalkyloxycarbonyl, ketone or ether;
a, b, c, d, e and fare each a number representing a repeating unit in the main chain, wherein a+b+c+d+e+f=1, the content of a and b is 0 to 0.7, respectively, (a+b)/(a+b+c+d+e+f)≧0.3, and the content of c, d, e and f is 0 to 0.9, respectively;
and
n is an integer of 0 or 1;
wherein the acid generating agent is at least one selected from the group consisting of the following formulas A and B:
where R1 and R2 are respectively alkyl, allyl, perfluoro alkyl, benzyl, aryl or halogen compound substituted aryl group;
R3, R4 and R5 are respectively hydrogen atom, alkyl group, halogen group, alkoxy group, aryl group, thiophenoxy group, thioalkoxy group or alkoxycarbonylmethoxy group;
and
n is an integer 1 to 8.

10 more elements

Dependencies are inferred from the claim text.

Acid-labile polymer and resist composition

Life of this patent

Acid-labile polymer and resist composition

Life of this patent

Abstract

Claims9