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AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsMikio Yamamuka, Takaaki Kawahara, Masayoshi Tarutani, Tsuyoshi Horikawa, Shigeru Matsuno, Takehiko Sato
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In the chemical vapor deposition apparatus, a substrate stage for mounting a substrate is provided inside a reaction chamber of the apparatus. A source gas inlet for introducing a source gas and exhaust outlets and for exhausting the source gas are provided. Exhaust outlet valves provided for exhaust outlets are open and shut successively with time. The direction of the flow of source gas relative to the fixed substrate varies with time. The present chemical vapor deposition apparatus allows the improved evenness of film thickness, the composition ratio, and the like within the substrate surface as well as the reduction of particles of foreign substance generated inside the reaction chamber.
A method of manufacturing a semiconductor device, comprising the step of having a semiconductor substrate fixedly held inside a reaction chamber, and forming a prescribed film on said semiconductor substrate while varying direction of flow of a source gas relative to said semiconductor substrate by varying direction of the flow of the source gas introduced into the reaction chamber with time.
Dependencies are inferred from the claim text.