Semiconductor structure including a partially annealed layer and method of forming the same

A process for fabricating a semiconductor structure, comprising:

• exposing a (100) surface of a monocrystalline silicon substrate, said surface comprising strontium and silicon, to strontium, titanium and oxygen while varying a partial pressure of oxygen so as to 1) epitaxially grow a 2 to 100 nm thick ordered monocrystalline layer of strontium titanate having a (100) crystal orientation rotated by 45° with respect to the (100) surface of the monocrystalline silicon substrate and 2) form an amorphous silicon oxide layer at the interface between the silicon substrate and the growing strontium titanate layer;
• forming, on the monocrystalline layer of strontium titanate, a template layer of Ti—As, Sr—O—As, Sr—Ga—O or Sr—Al—O;
• and
• exposing the template layer to gallium and arsenic to epitaxially grow a monocrystalline (100) GaAs layer on the monocrystalline layer of strontium titanate,
• wherein said partial pressure of oxygen is initially set at a value to grow stochiometric strontium titanate at a growth rate of about 0.3-0.5 nm per minute and, after initiating growth of strontium titanate, the partial pressure of oxygen is increased above said value to cause growth of said amorphous silicon oxide layer at the interface between the silicon substrate and the growing strontium titanate layer.