Method for fabricating dram cell array not requiring a device isolation layer between cells
AssigneeHyundai Electronics Industries Co., Ltd.
InventorKwan Kim
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AssigneeHyundai Electronics Industries Co., Ltd.
InventorKwan Kim
Estimating the term…
The present invention relates to a DRAM cell array and a fabrication method thereof, and which includes: a semiconductor substrate on which a plurality of active regions and isolation regions in a rectangular strip shape at a predetermined distance from each other are defined; a plurality of transistors each having a gate electrode formed by interleaving a gate insulating film on the active regions and a source and drain region formed in the substrate at both sides of the gate electrodes; a plurality of capacitors connected to one of the source and drain regions, and having a lower electrode and a upper electrode formed by interleaving a capacitor insulating film on the lower electrode; a plurality of bit lines connected to one of the source and drain regions of the plurality of transistors; and a plurality of word lines comprised of first word lines and second word lines arranged in parallel which are vertical to the direction in which the bit lines are arranged, and selectively connect the gate electrodes of the transistors.
A fabrication method for a DRAM cell array, comprising:
A fabrication method for a DRAM cell array, comprising:
Dependencies are inferred from the claim text.