Method of manufacturing a semiconductor integrated circuit device having a capacitor

A method of producing a semiconductor integrated circuit device having a capacitor element, comprising:

• (a) forming a semiconductor region in a semiconductor substrate;
• (b) forming a first insulating film having an opening exposing a part of said semiconductor region, on said semiconductor substrate;
• (c) forming a first conductive film comprising a first refractory metal in said opening of said first insulating film and on said first insulating film;
• (d) forming a second conductive film comprising a second refractory metal over said first conductive film in said opening of said first insulating film and over said first insulating film;
• (e) removing said first and second conductive films over said first insulating film and leaving said first and second conductive films in said opening of said first insulating film;
• (f) forming a third conductive film comprising a third refractory metal over said first and second conductive films left in said opening of said first insulating film;
• (g) forming a dielectric film for said capacitor element, over said third conductive film;
• and
• (h) performing thermal treatment of said dielectric film,
• wherein said third conductive film is in contact with said second conductive film left in said opening, and wherein said third conductive film which comprises said third refractory metal excludes titanium in contact with said first insulating film.