Solar cell and method of manufacturing same
AssigneeEbara Corporation
InventorsMakiko Emoto, Kentaro Fujita, Akio Shibata, Hiroshi Yokota
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Abstract
A solar cell is manufactured by bringing a front side of a semiconductor crystal substrate into contact with an electrolytic liquid containing a fluoride, placing an electrode in the electrolytic liquid, passing a current between the electrode and the semiconductor crystal substrate and applying light to the semiconductor crystal substrate to generate pairs of holes and electrons. Etching of the substrate proceeds by combining the holes with ions in the front side of the semiconductor crystal substrate which is held in contact with the electrolytic liquid, thereby forming at least one surface irregularity structure thereon.
Claims6
A method of manufacturing a solar cell, comprising:
- bringing a front side of a semiconductor crystal substrate into contact with an electrolytic liquid containing a fluoride;
- placing an electrode in said electrolytic liquid;
- passing a current between said electrode and said semiconductor crystal substrate and applying light to said semiconductor crystal substrate to generate pairs of holes and electrons;
- and
- etching said semiconductor crystal substrate by combining said holes with ions in the front side of the semiconductor crystal substrate which is held in contact with said electrolytic liquid, thereby forming a textured structure,
- wherein said semiconductor crystal substrate comprises a silicon substrate having a (111) surface.
Dependencies are inferred from the claim text.