Exposure mask and exposure method using the same
AssigneeAlps Electric Co., Ltd.
InventorsToshihiko Sato, Jun Iwasaki, Masaki Ikegami, Masami Kobayashi, Masaharu Yokoyama
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AssigneeAlps Electric Co., Ltd.
InventorsToshihiko Sato, Jun Iwasaki, Masaki Ikegami, Masami Kobayashi, Masaharu Yokoyama
Estimating the term…
An exposure mask for exposing a photosensitive resist layer formed on the surface of a substrate having an element so that the resist layer remains in the shape of an ABS pattern includes a mark provided within a light transmission section for exposure. The mark determines a relative position between the substrate and the light transmission section on the basis of the element. An exposure method using the exposure mask includes the steps of: determining a relative position between the substrate and the light transmission section on the basis of the element by the mark provided within the light transmission section of the exposure mask; exposing the photosensitive resist layer on the surface of the substrate through the light transmission section of the exposure mask; and developing the exposed photosensitive resist layer so that the resist layer is left in the shape of the ABS pattern.
A method of fabricating a magnetic head comprising:
Dependencies are inferred from the claim text.