Linear nanopositioning translational motion stage based on novel composite materials
AssigneenPoint, Inc.
InventorNorman A. Draeger
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Abstract
A nanopositioner made of novel materials is provided. The materials exhibit desirable properties such as low density and low coefficient of thermal expansion (CTE) derived from their ceramic matrices, but show even better (higher) Young's modulus of elasticity and flexural strength than neat ceramics. The materials are also amenable to wire electric discharge machining.
Claims19
A nanopositioner comprising a monolithic stage blank of composite material selected from the group consisting of ceramic matrix composites, polymer matrix composites, and graphite/epoxy composites, the monolithic stage blank having machined therein at least one flexural hinge.
A nanopositioner comprising a monolithic stage blank of composite material selected from the group consisting of C/SiC composites and SiC/SiC composites, the monolithic stage blank having machined therein at least one flexural hinge, the flexural hinge fabricated by first forming a carbon pre-form, machining at least one flexural hinge into the carbon pre-form to yield a machined pre-form, and then reacting the machined pre-form with SiO for a sufficient time and under suitable conditions to convert the machined preform into a C/SiC or SiC/SiC composite.
In a nanopositioner fabricated from a monolithic blank of material, the improvement comprising a flexural hinge stage fabricated from a composite material selected from the group consisting of ceramic matrix composites, polymer matrix composites, and graphite/epoxy composites.
Dependencies are inferred from the claim text.