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US 6,638,598 B2Granted
Laminates having a buffer layer and cover layer
AssigneeTheva Duennschichttechnik GmbH
InventorsHelmut Kinder, Markus Bauer, Joachim Schwachulla
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Abstract
A laminate includes an amorphous or polycrystalline substrate; a textured buffer layer arranged on the substrate and having a columnar structure wherein a low index crystal axis is inclined with respect to the substrate normal and a surface of columnar crystallites is inclined with respect to the low index crystal axis; at least one cover layer arranged on the buffer layer and having a closed surface; and an oriented thin layer.
Claims9
A laminate, comprising:
- an amorphous or polycrystalline substrate;
- a biaxially textured buffer layer arranged on the substrate and having a columnar structure wherein a low index crystal axis is inclined with respect to the substrate normal and a surface of columnar crystallites is inclined with respect to the low index crystal axis;
- at least one cover layer arranged on the buffer layer and having a closed surface, wherein the at least one cover layer fills in gaps in the biaxially textured buffer layer;
- and
- an oriented thin oxide layer.
2 more elements
A laminate, comprising:
- an amorphous or polycrystalline substrate;
- a biaxially textured buffer layer arranged on the substrate and having a columnar structure wherein a low index crystal axis is inclined with respect to the substrate normal and a surface of columnar crystallites is inclined with respect to the low index crystal axis;
- at least one biaxially textured cover layer arranged on the buffer layer and having a closed surface, wherein the at least one biaxially textured cover layer has a different morphology than the at least one biaxially textured buffer layer;
- and
- an oriented thin oxide layer.
2 more elements
Dependencies are inferred from the claim text.