Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic

A method of making a coated article, comprising:

• providing a substrate;
• depositing a first diamond-like carbon inclusive layer on the substrate by using at least one of the following gases in an ion beam deposition apparatus:
• a silane compound, an organosilane compound, an organosilazane compound, and an organo-oxysilicon compound;
• and
• depositing a second diamond-like carbon inclusive layer directly on and over the first diamond-like carbon inclusive layer by using a hydrocarbon gas in an ion beam deposition apparatus.

A method of making a coated article, the method comprising:

• providing a substrate;
• depositing a first DLC inclusive layer on the substrate using a first gas including silicon (Si);
• and
• depositing a second DLC inclusive layer on the substrate and on the first DLC inclusive layer using at least a second gas different than the first gas.

A method of making a coated article, the method comprising:

• providing a substrate;
• depositing a first DLC inclusive layer on the substrate using a first gas;
• and
• ion beam depositing a second DLC inclusive layer on the substrate and directly on and contacting the first DLC inclusive layer using at least a second gas different than the first gas.