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US 6,638,441 B2Granted
Method for pitch reduction
AssigneeMacronix International Co., Ltd.
InventorsChing-Yu Chang, Wei-Ming Chung
Life of this patent
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Abstract
A method for pitch reduction is disclosed. The method can form a pattern with a pitch ⅓ the original pitch formed by available photolithography technologies by only using one photo mask or one pattern transfer process, self-aligned etching back processes, and conventional deposition processes. By choosing appropriate layers to be deposited and etched, the pattern can be an etching mask or it can be a device structure itself.
Claims20
A method for pitch reduction, said method comprising:
- providing a substrate having a pattern of a photoresist layer thereon, wherein said pattern comprises a plurality of lines a;
- forming a first layer over said pattern and said substrate;
- etching back said first layer to expose said substrate;
- forming a second layer over said pattern, said first layer and said substrate;
- etching back said second layer to expose said pattern and said first layer;
- removing said pattern;
- forming a third layer over said first layer, said second layer and said substrate;
- etching back said third layer to expose said substrate;
- forming a fourth layer over said first layer, said second layer, said third layer and said substrate, wherein the material of said fourth layer is the same with the material of said first layer;
- etching back said fourth layer to expose said first layer, said second layer and said third layer;
- and
- removing said second layer and said third layer.
9 more elements
A method for pitch reduction, said method comprising:
- providing a substrate having a pattern of a dielectric layer thereon, wherein said pattern comprises a plurality of equidistance lines and the width of each said equidistance line equals to the pitch of two adjacent said equidistance lines;
- forming a first layer over said pattern and said substrate;
- etching back said first layer to expose said substrate;
- forming a second layer over said pattern, said first layer and said substrate;
- etching back said second layer to expose said pattern and said first layer;
- removing said pattern;
- forming a third layer over said first layer, said second layer and said substrate;
- etching back said third layer to expose said substrate;
- forming a fourth layer over said first layer, said second layer, said third layer and said substrate, wherein the material of said fourth layer is the same with the material of said first layer;
- etching back said fourth layer to expose said first layer, said second layer and said third layer;
- and
- removing said second layer and said third layer.
9 more elements
A method for pitch reduction, said method comprising:
- providing a substrate having a pattern of a layer thereon, wherein said pattern comprises a plurality of equidistance lines and the width of each said equidistance line equals to the pitch of two adjacent said equidistance lines;
- forming a first layer over said pattern and said substrate, wherein the thickness of said first layer is about ⅓ the pitch of two adjacent said equidistance lines;
- etching back said first layer to expose said substrate;
- forming a second layer over said pattern, said first layer and said substrate, wherein the thickness of said second layer is about ⅓ the pitch of two adjacent said equidistance lines;
- etching back said second layer to expose said pattern and said first layer;
- removing said pattern;
- forming a third layer over said first layer, said second layer and said substrate, wherein the thickness of said third layer is about ⅓ the pitch of two adjacent said equidistance lines;
- etching back said third layer to expose said substrate;
- forming a fourth layer over said first layer, said second layer, said third layer and said substrate, wherein the material of said fourth layer is the same with the material of said first layer and the thickness of said fourth layer is about ⅓ the pitch of two adjacent said equidistance lines;
- etching back said fourth layer to expose said first layer, said second layer and said third layer;
- and
- removing said second layer and said third layer.
9 more elements
Dependencies are inferred from the claim text.