Apparatus and method for manufacturing electron source, and method of manufacturing image-forming apparatus
AssigneeCanon Kabushiki Kaisha
InventorNoritake Suzuki
Life of this patent
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Abstract
An electron is source formed by a plurality of electron-emitting devices provided on a substrate and connected by a wiring. Use of an electron ray manufacturing apparatus having electrical connecting means connected to the wiring at three or more points can uniformize characteristics of a plurality of the electron-emitting devices.
Claims19
An apparatus for manufacturing an electron source having a plurality of electron-emitting devices provided on a substrate and connected by wiring, comprising:
- electrical connecting means connected to said wiring at three or more points.
A method for manufacturing an electron source having a plurality of electron-emitting devices provided on a substrate and connected by a wiring, comprising a step of energizing from electrical connecting means connected to said wiring at three or more points.
A method for manufacturing an electron source, comprising the steps of:
- forming a plurality of electroconductive films provided on a substrate and connected by a wiring;
- and
- energizing a plurality of said electroconductive films by electrical connecting means connected to said wiring at three or more points, wherein a temperature of said substrate is controlled in said step of energizing.
A method for manufacturing an electron source comprising the steps of:
- forming a plurality of electroconductive films matrix-wired by a plurality of row-directional wiring and a plurality of column-directional wiring;
- and
- energizing a plurality of said electroconductive films by electrical connecting means connected to two or more of said row-directional wiring and connected to said two or more row-directional wiring at three or more points, wherein a temperature of said substrate is controlled in said energizing step.
Dependencies are inferred from the claim text.