Acoustic vacuum pump
OwnerPierre Vanden Brande, Alain Weymeerschinventors
Life of this patent
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Abstract
Vacuum pump with a chamber (1) having, on one side, an intake (2) for pumping gas and, on the opposite side, an outlet (3) for the gas, displacement elements (4) being provided to drive the gas from the intake (2) towards the outlet (3), the displacement elements (4) including at least a vibrating element (4) for generating sound waves moving in the chamber (1), elements for closing (6) the outlet (3) being provided synchronously co-operating with the displacement elements (4) so as to clear the outlet opening (3) when the gas pressure in the proximity of the outlet (3) is higher than that in the proximity of the intake (2).
Claims17
Vacuum pump, with an acoustic compressor comprising a chamber (1) having, on one of its sides, an intake opening (2) for the gas to be pumped and, on the opposite side, an outlet opening (3) for said gas, at least one vibrating element (4) provided near the intake opening (2) for moving the gas from said intake opening (2) towards the outlet opening (3), characterised in that means are provided to subject the vibrating element (4) to a vibration having an amplitude which is at least two times higher than the average free path between the elastic collisions of the gas particles in the chamber (1), whereby said average free path corresponds to the local pressure measured near the vibrating element for generating, at a prevailing pressure in the chamber (1) between 10−2 and 1000 mbar, sound waves forming successive compression and depression zones in said gas between the intake opening (2) and the outlet opening (3).
Vacuum pump with an acoustic compressor comprising a chamber (1) having, on one of its sides, an intake opening (2) for the gas to be pumped and, on the opposite side, an outlet opening (3) for said gas, at least one vibrating element (4) provided near the intake opening (2) for moving the gas move from the intake opening (2) towards the outlet opening (3), means being provided to subject the vibrating element (4) to a vibration having an amplitude which is at least two times higher than the average free path between the elastic collisions of the gas particles in the chamber (1), whereby said free path corresponds to the local pressure measured near the vibrating element (4) for generating, at a prevailing pressure in the chamber (1) between 0.01 and 10 mbar, sound waves forming successive compression and depression zones in said gas between the intake opening (2) and the outlet opening (3), characterized in that closing means (6) are provided at the outlet opening (3) which synchronously co-operate with the vibrating element (4), such that the outlet opening (3) is cleared when the gas pressure in the proximity of said opening (3) is higher than the average pressure, named base pressure, prevailing at the inlet opening (2).
Dependencies are inferred from the claim text.