Gas friction pump
AssigneePfeiffer Vacuum GmbH
InventorsArmin Conrad, Heinrich Lotz
Life of this patent
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Abstract
A gas friction pump including a housing (1) having a suction opening (2) and a gas outlet opening (3), rotor (12) and stator (14) components arranged in the housing (1) for delivery of gases and for obtaining a pressure ratio; and an additional, at least one-stage, concave pump unit (20, 30, 40) provided at a side of the suction opening (2) and having a gas delivery structure, with the additional pump unit (20, 30, 40) being so formed that gas delivery takes place in a radial direction, and with rotor components (21, 31, 41) of the additional pump unit (20, 30, 40) being supported on the same rotor shaft (4) as the rotor components of the pump itself.
Claims5
A gas friction pump, comprising a housing (1) having a suction opening (2) and a gas outlet opening (3);
- rotor (12) and stator (14) components arranged in the housing (1) for delivery of gases and for obtaining a pressure ratio;
- a rotor shaft (4) located in the housing for supporting the rotor components (12);
- and an additional, at least one-stage, concave pump unit (20, 30, 40) provided at a side of the suction opening (2) and having a gas delivery structure, the additional pump unit (20, 30, 40) being so formed that gas delivery takes place in a radial direction, and rotor components (21, 31, 41) of the additional pump unit (20, 30, 40) being supported on the rotor shaft (4) of the gas friction pump.
Dependencies are inferred from the claim text.