System for fabricating solder bumps on semiconductor components
AssigneeMicron Technology, Inc.
InventorsWarren M. Farnworth, Ford Grigg
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AssigneeMicron Technology, Inc.
InventorsWarren M. Farnworth, Ford Grigg
Estimating the term…
A method and system for fabricating solder bumps on semiconductor components are provided. The component can be a wafer, a die, a package, or a BGA substrate. The component is provided with electrodes, such as aluminum bond pads, on which the solder bumps are formed. Initially, the electrodes are cleaned and activated for a subsequent electroless deposition processes. Next, adhesion metal layers are electrolessly deposited on the electrodes to provide adhesion. and a barrier layer on the electrodes. Next, solder wettable layers are electrolessly deposited on the adhesion metal layers, to provide wettable surfaces for depositing the solder bumps. Preferred materials include nickel for the adhesion metal layers, and palladium for the solder wettable layers. A wave soldering process is then used to deposit solder bumps on the solder wettable layers. Selected parameters of the wave soldering process including temperature, solder formulation, conveyor speed, and component orientation can be used to control the size and shape of the deposited solder bumps.
A system for fabricating solder bumps on a semiconductor component having a plurality of electrodes comprising:
A system for fabricating solder bumps on a semiconductor component having a plurality of electrodes comprising:
A system for fabricating solder bumps on a semiconductor component having a plurality of electrodes comprising:
A system for fabricating solder bumps on a semiconductor component having a plurality of electrodes comprising:
A system for fabricating solder bumps on a semiconductor component having a plurality of electrodes comprising:
A system for fabricating solder bumps on a semiconductor component having a plurality of electrodes comprising:
A system for fabricating solder bumps on a semiconductor component having a plurality of electrodes comprising:
Dependencies are inferred from the claim text.