Bulk chemical delivery system
AssigneeAdvanced Technology Materials, Inc.
InventorsCraig M. Noah, John N. Gregg, Robert M. Jackson, Craig Esser
Life of this patent
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Abstract
A bulk chemical delivery system, comprising: a bulk chemical canister that is connected to at least one manifold box, wherein each manifold box has at least two output lines, wherein each output line connects to a secondary canister. In non-limiting representative example, the bulk chemical canister may have a capacity of 200 liters. Also disclosed are novel manifolds for use in delivering chemicals from canisters and a transportation/containment cart.
Claims28
A bulk chemical delivery system, comprising:
- a first bulk chemical canister (103) that is connected to between one and four manifold boxes (110), wherein each manifold box has at least two output lines (112), wherein at least one output line connects to a secondary canister (121), characterized in that the bulk canister is housed within a transportation and containment cart (300) that is housed within a cabinet (350) wherein the secondary canister has a smaller capacity than the bulk canister, a first supply manifold that connects to the bulk canister and manifold box, and wherein the bulk canister and first supply manifold are housed in a cabinet.
A manifold system for use in refill of canister containing chemicals, comprising a first manifold, which comprises:
- a vacuum supply valve (10);
- a vacuum source (14);
- a pressure vent valve (20);
- a carrier gas isolation valve (30);
- a canister bypass valve (40);
- a process line isolation valve (50);
- a first control valve (60);
- a canister inlet valve (90);
- a canister outlet valve (100);
- a second control valve (70);
- a third control valve (80)
- wherein the vacuum supply valve is connected to the vacuum source (14);
- wherein the vacuum source (14) is connected to the pressure vent valve (20) and the first control valve (60);
- wherein the first control valve (60) is connected to the second control valve (70);
- wherein the carrier gas isolation valve (30) is connected to the pressure vent valve (20) and the canister bypass valve (40);
- wherein the canister bypass valve (40) is further connected to the carrier gas isolation valve (30) and the second control valve (70);
- wherein the process line isolation valve (50) is connected to the third control valve (80);
- wherein the canister inlet valve (90) is connected to the second control valve (70) and the third control valve (80);
- and
- wherein the canister outlet valve (100) is connected to the third control valve (80).
A manifold system for use in refill of canister containing chemicals, comprising a
- first manifold, which comprises:
- a vacuum supply valve (10);
- a vacuum source (14);
- a carrier gas isolation valve (30);
- a canister bypass valve (40);
- a process line isolation valve (50);
- a first control valve (60);
- a canister inlet valve (90);
- a canister outlet valve (100);
- a second control valve (70);
- a third control valve (80)
- wherein the vacuum supply valve is connected to the vacuum source (14);
- wherein the vacuum source (14) is connected to the first control valve (60);
- wherein the first control valve (60) is connected to the second control valve (70);
- wherein the carrier gas isolation valve (30) is connected to the canister bypass valve (40);
- wherein the canister bypass valve (40) is further connected to the carrier gas isolation valve (30) and the second control valve (70);
- wherein the process line isolation valve (50) is connected to the third control valve (80);
- wherein the canister inlet valve (90) is connected to the second control valve (70) and the third control valve (80);
- and
- wherein the canister outlet valve (100) is connected to the third control valve (80).
The manifold system of claim further 24, comprising a sample port upstream of said valves for withdrawing sample.
Dependencies are inferred from the claim text.