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US 6,637,314 B2Granted
Actuator
AssigneeSMC Corporation
InventorsShigekazu Nagai, Akio Saitoh, Masaki Miyahara
Life of this patent
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Abstract
An air is evacuated from a chamber of a bellows by a vacuum pressure supply source connected to a vacuum port of an attachment plate. The vacuum pressure in a vacuum chamber is thus balanced with the vacuum pressure in the chamber of the bellows. Consequently, the bellows is prevented from expanding by balancing the respective vacuum pressures in the chamber of the bellows and in the vacuum chamber.
Claims9
An actuator having a slider displaceable under a driving action of a driving section, said actuator comprising:
- an attachment plate for installing a main actuator body so that said slider can be accommodated in a vacuum chamber;
- a driving rod for displacing said slider under said driving action of said driving section;
- and
- a bellows surrounding said driving rod and being installed between said slider and said attachment plate to form a closed chamber, an air in said chamber of said bellows being evacuated by a vacuum pressure supply source connected to a vacuum port of said attachment plate.
1 more element
Dependencies are inferred from the claim text.