Method of producing edge reflection type surface acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsHideya Horiuchi, Michio Kadota, Junya Ago, Seigo Hayashi, Yasunori Takakuwa
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AssigneeMurata Manufacturing Co., Ltd.
InventorsHideya Horiuchi, Michio Kadota, Junya Ago, Seigo Hayashi, Yasunori Takakuwa
Estimating the term…
A method of manufacturing an edge reflection type surface acoustic wave device includes the step of preparing a surface acoustic wave mother substrate having a plurality of interdigital transducers formed on one main surface thereof. A cut groove is formed in the substrate by cutting the surface acoustic wave mother substrate beginning from the one main surface side thereof. This step of forming a cut groove is repeated so as to produce a plurality of cut grooves so that the first reflection edge of the respective surface acoustic wave devices are sequentially formed. Next, similarly, cut grooves are sequentially formed on the surface acoustic wave mother substrate from the one main-face side thereof so as not to reach the other main surface thereof, whereby the second reflection edges of the respective surface acoustic wave devices are sequentially formed.
A method of producing a plurality of edge reflection type surface acoustic wave devices having first and second reflection edges opposed to each other, the method comprising the steps of:
A method of producing a plurality of edge reflection type surface acoustic wave devices having first and second reflection edges opposed to each other, the method comprising the steps of:
A method of producing a plurality of edge reflection type surface acoustic wave devices having first and second reflection edges opposed to each other, the method comprising the steps of:
Dependencies are inferred from the claim text.