System and method for grating profile classification
AssigneeTimbre Technologies, Inc.
InventorsSrinivas Doddi, Nickhil Jakatdar, Xinhui Niu
Life of this patent
Estimating the term…
Abstract
Grating profile data is classified using a cluster generator to generate a plurality of clusters of grating profile data points from a data space containing grating profile data points. The cluster generator associates profile shape data to each cluster, and links the associated profile shape data to the grating profiles belonging to each cluster.
Claims11
A system for classifying grating profile data, the system comprising:
- a grazing profile data space containing grating profile data points and a cluster generator;
- wherein the cluster generator, upon activation, generates a plurality of clusters of grating profile data points from the data space containing grating profile data points by utilizing a clustering algorithm, the cluster generator associating profile shape data to each cluster of the plurality of clusters of grating profile data points, and the cluster generator linking the associated profile shape data to the grating profile data points belonging to each cluster of the plurality of grating profile data points.
A system for evaluating grating profile data, the system comprising:
- a profile cluster database for storing the profile shape data for a cluster of profiles;
- a library of grating profiles for storing profile instances consisting of profile dimensions, spectrum data, and a profile label;
- and
- a profile shape evaluator, coupled to the profile cluster database and to the library of grating profiles;
- where the profile shape evaluator, upon being activated, accesses the library profile data from a grating profile library instance selected as the closest match to an input grating profile, the profile shape evaluator comparing the library profile data with a set of acceptable ranges of library profile data for the application and flagging the input grating profile if the library profile data is outside the set of acceptable ranges of profile data forte application or flagging the input grating profile if the library profile data is within the set of acceptable ranges of profile data for the application.
A computerized display for presenting grating evaluation data, the display format comprising:
- a set of grating profile dimensions and calculated values derived from clustering the grating profile data points dimensions representing a grating profile;
- a profile label associated with the set of grating profile dimensions;
- a profile graphic image associated with the set of grating profile dimensions;
- a profile description;
- and
- an alert flag.
A computer storage medium storing the computer readable code for causing a computer to execute the steps of a method for classifying grating profile data, the method comprising:
- requesting creation of grating profile data from a grating profile data space consisting of grating profile data points;
- determining a number of clusters for the grating profile data space;
- clustering the grating profile data points into the number of clusters of the grating profile data space;
- and
- associating profile shape data to each cluster of grating profile data points.
Dependencies are inferred from the claim text.