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US 6,636,632 B2Granted
Image processor and image processing method
AssigneeIbiden Co., Ltd.
InventorMasahiro Okada
Life of this patent
Estimating the term…
Abstract
An image processor wherein, with respect to pixels included in a pattern image and in a plural directions from a selected pixel among pixels, a number of same kind of pixels which consecutively continues from the selected pixel is counted. A processing recognition area effective signal that shows a range in which an area to be processed exists is produced. Whether the selected pixel is a processing candidate pixel is determined based on a determination whether the number is larger, in the plural directions, than a reference value. A processing image is made by comparing the processing candidate pixel and the processing recognition area effective signal.
Claims19
An image processor comprising:
- a pattern image making unit configured to make a pattern image formed from pixel data obtained by capturing a surface of an object to be inspected, said pattern image including black pixels;
- a mask candidate pixel determining unit configured to determine whether each black pixel of said black pixels included in said pattern image is a mask candidate pixel, said mask candidate pixel determining unit comprising:
- a selecting unit configured to select one black pixel from said black pixels included in said pattern image;
- a counter configured to count in each of plural directions a pixel number of consecutive black pixels which consecutively continue from said selected one black pixel along said each of plural directions;
- a comparison unit configured to determine with respect to said each of plural directions an OK direction along which the pixel number is at most a predetermined reference pixel number;
- a determining unit configured to determine that the selected one black pixel is the mask candidate pixel when a direction number of said OK direction with respect to the selected one black pixel is at least a predetermined reference direction number;
- a general mask area storage unit configured to memorize a general mask area in which an inspection on the surface of the object is not generally performed;
- and
- a mask area determining unit configured to determine a mask area in which the inspection is not performed based on the mask candidate pixel and the general mask area.
6 more elements
An image processor comprising:
- pattern image making means for making a pattern image formed from pixel data obtained by capturing a surface of an object to be inspected, said pattern image including black pixels;
- mask candidate pixel determining means for determining whether each black pixel of said black pixels included in said pattern image is a mask candidate pixel, said mask candidate pixel determining means comprising:
- selecting means for selecting one black pixel from said black pixels included in said pattern image;
- counter means for counting in each of plural directions a pixel number of consecutive black pixels which consecutively continue from said selected one black pixel along said each of plural directions;
- comparison means for determining with respect to said each of plural directions an OK direction along which the pixel number is at most a predetermined reference pixel number;
- determining means for determining that the selected one black pixel is the mask candidate pixel when a direction number of said OK direction with respect to the selected one black pixel is at least a predetermined reference direction number;
- general mask area storage means for memorizing a general mask area in which an inspection on the surface of the object is not generally performed;
- and
- mask area determining means for determining a mask area in which the inspection is not performed based on the mask candidate pixel and the general mask area.
6 more elements
An image processing method comprising:
- making a pattern image formed from pixel data obtained by capturing a surface of an object to be inspected, said pattern image including black pixels;
- determining whether each black pixel of said black pixels included in said pattern image is a mask candidate pixel, said mask candidate pixel determining means comprising:
- selecting one black pixel from said black pixels included in said pattern image;
- counting in each of plural directions a pixel number of consecutive black pixels which consecutively continue from said selected one black pixel along said each of plural directions;
- determining with respect to said each of plural directions an OK direction along which the pixel number is at most a predetermined reference pixel number;
- determining that the selected one black pixel is the mask candidate pixel when a direction number of said OK direction with respect to the selected one black pixel is at least a predetermined reference direction number;
- memorizing a general mask area in which an inspection on the surface of the object is not generally performed;
- and
- determining means for determining a mask area in which the inspection is not performed based on the mask candidate pixel and the general mask area.
6 more elements
An inspection apparatus comprising:
- a pattern image making unit configured to make a pattern image formed from pixel data obtained by capturing a surface of an object to be inspected, said pattern image including black pixels;
- a mask candidate pixel determining unit configured to determine whether each black pixel of said black pixels included in said pattern image is a mask candidate pixel, said mask candidate pixel determining unit comprising:
- a selecting unit configured to select one black pixel from said black pixels included in said pattern image;
- a counter configured to count in each of plural directions a pixel number of consecutive black pixels which consecutively continue from said selected one black pixel along said each of plural directions;
- a comparison unit configured to determine with respect to said each of plural directions an OK direction along which the pixel number is at most a predetermined reference pixel number;
- a determining unit configured to determine that the selected one black pixel is the mask candidate pixel when a direction number of said OK direction with respect to the selected one black pixel is at least a predetermined reference direction number;
- a general mask area storage unit configured to memorize a general mask area in which an inspection on the surface of the object is not generally performed;
- a mask area determining unit configured to determine a mask area in which the inspection is not performed based on the mask candidate pixel and the general mask area;
- and
- an inspecting unit configured to detect a defect shape from the pattern image except for the mask area.
7 more elements
Dependencies are inferred from the claim text.