Surface emitting semiconductor laser, surface emitting semiconductor laser array, and method for manufacturing surface emitting semiconductor laser

A surface emitting semiconductor laser array comprising a plurality of surface emitting semiconductor lasers arranged on a semiconductor substrate, each semiconductor laser comprising:

• a first reflection mirror layer of the first conduction type formed on the main plane of the semiconductor substrate, an active layer having a quantum well laminated above the first reflection mirror layer;
• a post having a second reflection mirror layer of the second conduction type different from the first conduction type for constituting a resonator structure together with the first reflection mirror;
• at least a first peripheral high resistance layer and a second peripheral high resistance layer having a periphery of high resistance and inserted between the first reflection mirror layer and the second reflection mirror layer;
• at least the first peripheral high resistance layer and the second peripheral high resistance layers are made to be highly resistant by oxidation;
• at least the first peripheral high resistance layer has the periphery of high resistance which is different in proportion between two arbitrary axial directions orthogonal in a plane parallel to a main plane of the semiconductor substrate;
• and
• a shape of the non-high resistance area of at least the second peripheral high resistance layer in the plane parallel to the main plane of the semiconductor substrate is a regular polygon or a regular circle.