Semiconductor device having high-density packaging thereof
AssigneeOki Electric Industry Co., Ltd.
InventorAkio Nakamura
Life of this patent
Estimating the term…
Abstract
A semiconductor device comprises a semiconductor IC chip provided with bond pads on its first surface, a wiring board provided with a through hole extending between the opposite surfaces thereof, conductive members electrically connecting the bond pads of the semiconductor IC chip to those formed on the wiring board, and a sealing resin coating coating the surface of the semiconductor IC chip and the conductive members, and bonding the side surfaces of the semiconductor IC chip to the side surfaces of the through hole of the wiring board.
Claims32
A method of manufacturing a semiconductor device comprising:
- providing a wiring substrate having a substrate first surface and a substrate second surface opposite to the substrate first surface, the wiring substrate having a plurality of conductive lines formed on the substrate first surface and a through hole extending between the substrate first and second surfaces;
- providing a semiconductor IC chip having a chip first surface, a chip second surface opposite to the chip first surface and a plurality of chip side surfaces extending between the chip first and second chip surfaces, the semiconductor IC chip including a plurality of bond pads formed on the chip first surface;
- providing a stage having a chip area for mounting the semiconductor IC chip;
- mounting the semiconductor IC chip on the chip area of the stage;
- aligning the stage with the wiring substrate so that the semiconductor chip is located in the through hole, and a level of the first surface of the wiring surface is substantially equal to a level of the first surface of the semiconductor IC chip;
- electrically connecting the bond pads with the conductive lines by a plurality of conductive members, respectively;
- coating the conductive members, the chip first surface, the chip side surfaces, the through hole and a part of the substrate first surface, with a sealing resin;
- and
- detaching the stage from the semiconductor IC chip, leaving substantially only the sealing resin physically connecting the semiconductor IC chip with the wiring substrate.
A method of manufacturing a semiconductor device comprising:
- providing a wiring substrate having a substrate first surface and a substrate second surface opposite to the substrate first surface, the wiring substrate having a plurality of conductive lines formed on the substrate first surface and a through hole extending between the substrate first and second surfaces;
- putting an adhesive sheet on the substrate second surface so that the adhesive sheet is exposed through the through hole;
- providing a semiconductor IC chip having a chip first surface, a chip second surface opposite to the chip first surface and a plurality of chip side surfaces extending between the chip first and second surfaces, the semiconductor IC chip including a plurality of bond pads formed on the chip first surface;
- positioning the semiconductor IC chip on the exposed adhesive sheet in the through hole;
- providing a stage having a chip area for mounting the semiconductor IC chip;
- aligning the stage with the wiring substrate so that a level of the substrate first surface is substantially equal to a level of the chip first surface;
- electrically connecting the bond pads with the conductive lines by a plurality of conductive members, respectively;
- coating the conductive members, the chip first surface chip side surfaces, the through hole and a part of the substrate first surface, with a sealing resin;
- and
- detaching the stage from the semiconductor IC chip, leaving substantially only the sealing resin physically connecting the semiconductor IC chip with the wiring substrate.
A method of manufacturing a semiconductor device according to 9, wherein the chip area of the stage is smaller than the chip second surface.
A method of manufacturing a semiconductor device comprising:
- providing a wiring substrate having a substrate first surface and a substrate second surface opposite to the substrate first surface, the wiring substrate having a plurality of conductive lines formed on the substrate first surface and a through hole extending between the substrate first and second surfaces;
- providing a semiconductor IC chip having a chip first surface, a chip second surface opposite to the chip first surface and a plurality of chip side surfaces extending between the chip first and second surfaces, the semiconductor IC chip including a plurality of bond pads on the chip first surface;
- providing a stage having a chip area for mounting the semiconductor IC chip;
- mounting the semiconductor IC chip on the chip area of the stage;
- aligning the stage with the wiring substrate so that the semiconductor chip is located in the through hole, and a level of the substrate first surface is substantially equal to a level of the chip first surface;
- locating a pattern of conductive paste on a transfer roller;
- moving the transfer roller on the substrate first surface and the chip first surface with a rotation so that the bond pads and the conductive lines are connected by the pattern of conductive paste, respectively;
- and
- coating the pattern of conductive paste, the chip first surface, the chip side surfaces, the through hole and a part of the substrate first surface with a sealing resin, wherein the sealing resin is a substantially sole member physically connecting the semiconductor IC chip with the wiring substrate.
A method of manufacturing a semiconductor device comprising:
- providing a wiring substrate having a substrate first surface and a substrate second surface opposite to the substrate first surface, the wiring substrate having a plurality of conductive lines formed on the substrate first surface and a through hole extending between the substrate first and second surfaces;
- putting an adhesive sheet on the substrate second surface so that the adhesive sheet is exposed through the through hole;
- providing a semiconductor IC chip having a chip first surface, a chip second surface opposite to the chip first surface and a plurality of chip side surfaces extending between the chip first and second surfaces, the semiconductor IC chip including a plurality of bond pads formed on the chip first surface;
- positioning the semiconductor IC chip on the exposed adhesive sheet in the through hole;
- providing a stage having a chip area for mounting the semiconductor IC chip;
- aligning the stage with the wiring substrate so that a level of the substrate first surface is substantially equal to a level of the chip first surface;
- locating a pattern of conductive paste on a transfer roller;
- moving the transfer roller on the substrate first surface and the chip first surface with a rotation so that the bond pads and the conductive lines are connected by the pattern of conductive paste, respectively;
- and
- coating the pattern of conductive paste, the chip first surface, the chip side surfaces, the through hole and a part of the substrate first surface with a sealing resin, wherein the sealing resin is a substantially sole member physically connecting the semiconductor IC chip with the wiring substrate.
Dependencies are inferred from the claim text.