Wafer probe station having environment control enclosure
AssigneeCascade Microtech, Inc.
InventorsWarren K. Harwood, Paul A. Tervo, Martin J. Koxxy
Life of this patent
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Abstract
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
Claims15
A probe station comprising:
- (a) a chuck having a surface for supporting a test device;
- (b) at least one support for a probe to contact said test device;
- and
- (c) an enclosure substantially surrounding said surface and having a side member and an electrically conductive lower member, said electrically conductive lower member defining an aperture for receiving a positioning member secured to said chuck, said aperture being capable of relative lateral movement with respect to said side member.
A probe station comprising:
- (a) a chuck having a surface for supporting a test device;
- (b) at least one support for a probe to contact said test device;
- and
- (c) an enclosure substantially surrounding said surface and having a side member, and a lower member comprising overlapping, relatively slidable members extending laterally beneath said surface, said slidable members being of different sizes and defining apertures of different sizes, and wherein a smallest one of said apertures receives a positioning member secured to said chuck.
Dependencies are inferred from the claim text.