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US 6,635,996 B1Granted
Plasma generating apparatus, plasma generating method and gas processing method by plasma reaction
AssigneeCanon Kabushiki Kaisha
InventorsIkuo Nakajima, Toshiji Nishiguchi
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Abstract
A plasma generating apparatus comprises a pair of electrodes consisting of an electrode connected to an AC power source and a grounded electrode. An inorganic dielectric substance containing barium titanate as a principal component is filled between the electrodes. It is possible to generate a stable and uniform glow discharge under the atmospheric pressure at low cost by applying a considerably low voltage between said electrodes.
Claims16
A plasma generating apparatus comprising:
- a reactor,
- a ground electrode provided to the reactor,
- an electrode connected to an AC power source and placed opposite and around the ground electrode,
- a space between the electrode connected to the AC power source and the ground electrode filled with an inorganic dielectric substance which has a plurality of gaps through which a gas can flow, and
- a flange which holds the inorganic dielectric substance in the space,
- wherein the ground electrode has an elongated shape along the direction of the gas flow and does not extend over the flange out of the space filled with the inorganic dielectric substance.
3 more elements
A plasma generating method comprising the steps of:
- applying an AC electric field to an inorganic dielectric substance,
- wherein said inorganic dielectric substance is filled within a space of a plasma generating apparatus comprising:
- a reactor,
- a ground electrode provided to the reactor, and
- an electrode connected to an AC power source and placed opposite and around the ground electrode,
- the space between the electrode connected to the AC power source and the ground electrode filled with the inorganic dielectric substance which has a plurality of gaps through which a gas can flow, and
- a flange which holds the inorganic dielectric substance in the space,
- wherein the ground electrode has an elongated shape along the direction of the gas flow and does not extend over the flange out of the space filled with the inorganic dielectric substance.
5 more elements
Dependencies are inferred from the claim text.