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US 6,635,947 B2Granted
Monolithically integrable inductor
AssigneeInfineon Technologies AG
InventorsAlexander Benedix, Georg Braun, Helmut Fischer, Bernd Klehn, Sebastian Kuhne
Life of this patent
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Abstract
A monolithically integrable inductor containing a layer sequence of conductive layers and insulating layers that are stacked mutually alternately above one another is described. The conductive layers are configured in such a way that they form a coil-type structure around a central region, in which giant magnetic resistance materials can be provided.
Claims9
A monolithically integrated inductor, comprising:
- a layer sequence formed of a plurality of mutually respectively alternating conductive layers and insulating layers disposed such that said conductive layers and said insulating layers are stacked above one another, said insulating layers formed in a whole-area manner, said conductive layers having central regions and edge regions contiguous with said central regions, in which said edge regions in successive ones of said conductive layers are offset relative to one another;
- additional insulating layers, one of said additional insulating layers disposed in one of said central regions and said edge regions of each of said conductive layers, said additional insulating layers replacing said conductive layers in said central regions and said edge regions;
- contacts connecting said conductive layers to one another via holes through said insulating layers, said contacts between successive ones of said conductive layers disposed in each case in said insulating layers in regions close to said edge regions;
- and
- giant magnetic resistance materials, said layer sequence having a central region with a trench formed therein filled with said giant magnetic resistance materials forming a magnetoresistive random access memory cell, said central region of said layer sequence defined by said central regions of said conductive layers.
2 more elements
A monolithically integrated inductor, comprising:
- a layer sequence formed of a plurality of mutually respectively alternating layers including given layers and insulating layers, said alternating layers disposed to stack said given layers and said insulating layers above one another, said insulating layers formed in a whole-area manner, each of said given layers having a conductive region, a central region and an edge region contiguous with said central region, edge regions in successive ones of said given layers being offset relative to one another, central regions and said edge regions in said given layers forming additional insulating layers;
- contacts connecting said given layers to one another via holes through said insulating layers, said contacts between successive ones of said given layers disposed in each case in said insulating layers in regions close to said edge regions;
- and
- giant magnetic resistance materials, said layer sequence having a central region with a trench formed therein filled with said giant magnetic resistance materials forming a magnetoresistive random access memory cell, said central region of said layer sequence defined by said central regions of said given layers.
1 more element
Dependencies are inferred from the claim text.