Semiconductor element having microcrystalline grains and manufacturing method thereof
AssigneeCanon Kabushiki Kaisha
InventorsKeishi Saito, Masafumi Sano
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Abstract
In a semiconductor element comprising microcrystalline semiconductor, a semiconductor junction is provided within a microcrystal grain. Further, in a semiconductor element comprising microcrystalline semiconductor, providing microcrystal grains of different grain diameters as a mixture to form a semiconductor layer. Thereby, discontinuity of a semiconductor junction is improved to improve the characteristics, durability, and heat resisting properties of a semiconductor element. Distortion in a semiconductor layer is also reduced.
Claims9
A semiconductor element comprising microcrystalline semiconductor having a semiconductor junction in a microcrystal grain,
- wherein at least some microcrystal grains extend between at least two adjacent semiconductor layers.
A semiconductor element comprising
- a semiconductor layer having first electric characteristics,
- a semiconductor layer having second electric characteristics, and
- a semiconductor layer having third electric characteristics stacked in the named order,
- wherein at least some microcrystal grains extend between the semiconductor layer having the first electric characteristics and the semiconductor layer having the second electric characteristics.
Dependencies are inferred from the claim text.