Self-cleaning technique for contamination on calibration sample in SEM
AssigneeAdvanced Micro Devices, Inc.
InventorsBhanwar Singh, Michael K. Templeton, Sanjay K. Yedur, Bryan K. Choo
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Abstract
The present invention provides SEM calibration standards, and associated SEM systems and SEM calibration methods, that are self-cleaning with respect to electron beam deposited carbon. The calibration standards have coatings containing a transition metal oxide. The coatings facilitate oxidation of deposited carbon, whereby carbon buildup can be stopped or reversed. By providing a mechanism to mitigate carbon buildup, calibration standards provided by the present invention achieve high accuracy, high durability, and low cost.
Claims25
A method of calibrating a SEM system, comprising:
- obtaining a calibration measurement by employing the SEM system to measure a dimension of a feature of a calibration standard, wherein the feature comprises a coating comprising a transition metal oxide selected from the group consisting of TiO2, Cr2O3, CrO3, MoO2, MoO3, WO2, WO3, MnO2, MnO3, Fe2O3, Co3O4, NiO, CuO, ZnO, In2O3, SnO, and SnO2;
- and
- using the calibration measurement to calibrate the SEM system.
A method of calibrating a SEM system, comprising:
- obtaining a calibration measurement by employing the SEM system to measure a dimension of a feature of a calibration standard, wherein the feature comprises a coating comprising a transition metal oxide selected from the group consisting of TiO2, Cr2O3, CrO3, MoO2, MoO3, WO2, WO3, MnO2, MnO3, Fe2O3, Co3O4, NiO, CuO, ZnO, In2O3, SnO, and SnO2, the coating having a thickness from about 1 nm to about 100 nm;
- and
- using the calibration measurement to calibrate the SEM system.
A method of calibrating a SEM system, comprising:
- obtaining a calibration measurement by employing the SEM system to measure a dimension of a feature of a calibration standard, wherein the feature comprises a coating comprising a transition metal oxide selected from the group consisting of TiO2, Cr2O3, CrO3, MoO2, MoO3, WO2, WO3, MnO2, MnO3, Fe2O3, Co3O4, NiO, CuO, ZnO, In2O3, SnO, and SnO2;
- flowing a current through the calibration standard to oxidize carbon deposits on the calibration standard;
- and
- using the calibration measurement to calibrate the SEM system.
Dependencies are inferred from the claim text.