Step function determination of Auger peak intensity

A method of analyzing an electron intensity spectrum, comprising the steps of:

• measuring electron intensities of electrons emanating from a sample as a function of values of a measurement parameter associated with measurement energies on either side of an anticipated peak energy in said spectrum;
• fitting a first portion of said spectrum above said anticipated peak energy to a first equation dependent upon said measurement parameter;
• fitting a second portion of said spectrum below said anticipated peak energy to a second equation dependent upon said measurement parameter;
• and
• associating a comparison between said two equations with a concentration of an element in said sample.

An electron spectrometer system, comprising:

• a source of primary electrons for irradiating a sample;
• an electron energy analyzer for measuring an intensity spectrum and measurement parameter of electrons emitted from said sample in response to said primary electrons and storing said spectrum in a memory;
• first calculation means for fitting a first portion of said spectrum in a first predetermined range of said measurement parameter less than a given measurement parameter value to a first expression dependent upon said measurement parameter and for fitting a second portion of said spectrum in a second predetermined range of said measurement parameter greater than said given measurement parameter value of to a second expression dependent upon said measurement parameter;
• and
• second calculation means for establishing a difference between said first and second expressions at said given measurement parameter value.