Mass spectrometry apparatus
AssigneeAnelva Corporation
InventorsYoshiro Shiokawa, Megumi Nakamura, Toshihiro Fujii
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AssigneeAnelva Corporation
InventorsYoshiro Shiokawa, Megumi Nakamura, Toshihiro Fujii
Estimating the term…
A mass spectrometry apparatus is provided with a mass spectrometry mechanism for analyzing the mass of ionized detected gas. The mass spectrometry apparatus is further provided with two ion sources, that is, a first ion source for attaching positive charge metal ions to cause ionization, and a second ion source for causing electrons to impact to cause ionization. Based on the configuration, it becomes possible to simultaneously or separately measure the molecular weight and analyze the molecular structure of the detected gas with a high sensitivity. The second ion source is positioned between the first ion source and the mass spectrometry mechanism and the detected gas is introduced into the first ion source. According to the above mass spectrometry apparatus, it is possible to measure the accurate molecular weight of the detected gas with a sufficient sensitivity and to simultaneously analyze the molecular structure with a sufficient sensitivity.
A mass spectrometry apparatus including an ion source for ionizing a detected gas, a mass spectrometry mechanism for analyzing the mass of the ionized detected gas, and a vacuum pump for evacuating both insides of the ion source and the mass spectrometry mechanism,
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