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US 6,635,849 B1Granted
Laser beam machine for micro-hole machining
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsTatsuki Okawa, Yasuhiko Iwai, Miki Kurosawa, Masanori Mizuno
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Abstract
The present invention relates to a laser beam machine having a laser oscillator, for generating a laser beam; a light path system, including galvano mirrors and an fθ lens that form a light path along which the laser beam emitted by the laser oscillator is guided to an object; and a diffractive optical element, located along the light path leading from the laser oscillator to the galvano mirrors.
Claims7
A laser beam machine comprising:
- a laser oscillator, for generating a laser beam;
- a light path system, including galvano mirrors and an fθ lens that form a light path along which said laser beam emitted by said laser oscillator is guided to an object;
- and
- a diffractive optical element, located along said light path leading from said laser oscillator to said galvano mirrors,
- wherein laser beams obtained by branching said laser beam at said diffractive optical element are condensed via said galvano mirrors and said fθ lens to said object, and
- wherein said diffractive optical element generates a machining pattern.
3 more elements
Dependencies are inferred from the claim text.