MEMS micro-relay with coupled electrostatic and electromagnetic actuation

A microelectromechanical relay comprising:

• a substrate having a trench formed therein;
• a first pair of contacts located in the trench of the substrate;
• a microelectromechanical actuator on the substrate for controllably establishing electrical contact between the first pair of contacts on the substrate, the actuator comprising:
• spaced apart supports on the substrate;
• a movable beam extending between the spaced apart supports;
• a contact cross bar located on the movable beam, the contact cross bar facing the first pair of contacts;
• means for generating an electromechanical force on the movable beam to deflect the beam towards the substrate;
• and
• means for generating an electrostatic force between the beam and the substrate so that the contact cross bar is brought into physical contact with the first pair of contacts.

A microrelay comprising:

• a substrate layer having a trench formed therein;
• a first pair of contacts located in the trench of the substrate;
• a microelectromechanical actuator on the substrate for a controllably establishing electrical contact between the first pair of contacts on the substrate, the actuator comprising:
• spaced apart supports on the substrate;
• a movable beam extending between the spaced apart supports;
• a contact cross bar located on the movable beam, the contact cross bar facing the first pair of contacts;
• a first electrode located on the movable beam;
• a second electrode located on the substrate, wherein the first electrode is at a different potential than the second electrode so that when the first and second electrodes are brought into close proximity to one another, an electrostatic force exists therebetween to bring the contact cross bar in contact with the first pair of contacts;
• and
• current carrying coils located in the movable beam wherein when the relay is placed in a permanent magnetic field, an electromagnetic force is exerted on the movable beam to deflect the beam towards the pair of contacts close enough so that the electrostatic force takes over.

A microelectromechanical relay comprising:

• a substrate layer;
• a first pair of contacts located on the substrate;
• a microelectromechanical actuator on the substrate for controllably establishing electrical contact between the first pair of contacts on the substrate, the actuator comprising:
• spaced apart supports on the substrate;
• a movable beam extending between the spaced apart supports;
• a contact cross bar located on the movable beam, the contact cross bar facing the first pair of contacts;
• an electromagnetic device configured and arranged to generate an electromagnetic force between the movable beam and the substrate to deflect the movable beam towards the first pair of contacts on the substrate;
• and
• an electrostatic device configured and arranged to generate a electrostatic force between the beam and the substrate to bring the cross bar in physical contact with the first pair of contacts.