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US 6,635,494 B2Granted
Method of forming a two-dimensionally arrayed quantum device using a metalloprotein complex as a quantum-dot mask array
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorIchiro Yamashita
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Abstract
A quantum device is constituted from a two-dimensional array of quantum dots formed from metal atom aggregates contained in a metalloprotein complex. The metalloprotein is arranged on the surface of a substrate having an insulation layer with a pitch of the size of the metalloprotein complex. The diameter of the metal atom aggregates used in the quantum device is 7 nm or smaller, and the pitch of the metalloprotein complex is preferably from 11 to 14 nm.
Claims2
A method of forming microscopic dots on the order of nanometers having quantum effects, said method comprising:
- arraying a plurality of masking quantum dots formed from a plurality of metal atom aggregates contained in a metalloprotein complex in a two-dimensional configuration on a surface of a substrate having a semiconductor layer with a pitch of a size of the metalloprotein complex;
- forming column shaped structures on the surface of the substrate by plasma etching via the masking quantum dots;
- and
- insulating a space between the column shaped structures.
1 more element
Dependencies are inferred from the claim text.