Methods utilizing scanning probe microscope tips and products therefor or products thereby
AssigneeNorthwestern University
InventorsChad A. Mirkin, Richard Piner, Seunghun Hong
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Abstract
A method of direct-write nanolithography comprising: providing a solid substrate comprising a surface; providing a nanoscopic tip coated with patterning compound; and contacting the coated tip with the substrate, so that the patterning compound is delivered to the substrate so as to produce a desired pattern in submicrometer dimensions. Nanolithographic resolution can be affected by substrate grain size, diffusion rate of the patterning compound, tip-substrate contact time, the rate of transport of the patterning compound from the tip to the substrate, and tip sharpness. The method is a useful tool for fabrication of nanoscale structures.
Claims20
A method of direct-write nanolithography, comprising:
- providing a solid substrate comprising a gold surface;
- providing an atomic force microscope tip coated with sulfur compound;
- and
- contacting the coated tip with the substrate, so that the sulfur compound is delivered to the substrate so as to produce a desired pattern in submicrometer dimensions.
A method, comprising delivering a thiol molecule from a thiol-coated atomic force microscope tip to a gold substrate so that the thiol is chemisorbed to the gold substrate in a self-assembled monolayer.
A method for making a self-assembled monolayer by nanolithography without a resist or a stamp, consisting essentially of depositing a thiol molecule from a thiol-coated tip onto a gold substrate to form said self-assembled monolayer.
Dependencies are inferred from the claim text.