Manufacturing method for thin-film solar cells

An arc vapor synthesis method for depositing a coating onto a solid substrate for the fabrication of a functional layer in a solar cell device wherein said functional layer is used as an anti-reflection layer, an active layer for photon absorption and charge generation, a buffer layer, a window layer, or an electrode layer, said method comprising:

• (a) providing an ionized arc nozzle means comprising a consumable electrode, a non-consumable electrode, and a working gas flow to form an ionized arc between said consumable electrode and said non-consumable electrode, wherein said consumable electrode provides a metal material vaporizable therefrom by said ionized arc;
• (b) operating said arc nozzle means to heat and at least partially vaporize said metal material for providing a stream of nanometer-sized vapor clusters of said metal material into a chamber in which said substrate is disposed;
• (c) introducing a stream of a reactive gas into said chamber to impinge upon said stream of metal vapor clusters and exothermically react therewith to produce substantially nanometer-sized compound semiconductor or ceramic clusters;
• and
• (d) directing said compound semiconductor or ceramic clusters to deposit onto said substrate for forming said coating.