Method of regenerating a phase-change sputtering target for optical storage media
AssigneeIndustrial Technology Research Institute
InventorsJyh-Chung Wen, Ming-Shyong Lai, Bean-Jon Li
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Abstract
A method of regenerating a phase-change sputtering target for optical storage media. First, a used powder-metallurgy sputtering target composed of a target material, an adhesion material, and a backing plate is recycled. Then, the target material is separated from the backing plate. Then, the target adhesion material is scraped from the recycled target material Thereafter, the surface of the recycled target material is processed. Finally, the backing plate, a new adhesion material, the recycled target material, and new powders are placed in a vacuum thermal-pressure furnace in sequence to perform a thermal-pressure sintering process. This completes a new phase-change sputtering target
Claims14
A method of regenerating a powder-metallurgy sputtering target, comprising steps of:
- (a) recycling a used powder-metallurgy sputtering target which comprises a target material made by powder metallurgy, an adhesion material and a backing plate of alloy;
- (b) separating the target material from the backing plate
- (c) scraping the adhesion material from the target material;
- (d) processing the surface of the target material;
- and
- (e) placing the backing plate, a new adhesion material, the target material and new powder in sequence into a vacuum thermal-pressure furnace to perform a thermal-pressure sintering process to form a new powder-metallurgy sputtering target.
Dependencies are inferred from the claim text.