Apparatus and methods for pumping high viscosity fluids
AssigneeMykrolis Corporation
InventorGregory M. Gibson
Life of this patent
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Abstract
A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon® or some similar non-contaminating fluid, for applications such as cleanroom processes. A valve and a filter chamber are incorporated into a pump head to simplify the flow path and reduce potential contamination points. Preferred methods, and chips or other microelectronic devices fabricated from the apparatus or methods, are also disclosed.
Claims27
A method for filtering and dispensing fluid, including the steps of:
- providing a three-way valve means integrally formed in an upper head of a first pumping member, said valve means configured to receive the subject fluid and direct it in a substantially upward path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source through said valve means;
- and
- further actuating said first pumping member to dispense the subject fluid upwardly from said first pumping member through filtering means.
A method for filtering and dispensing fluid, including the steps of:
- providing a non-contaminating high-flow three-way valve means sufficient to control excessive pressure drop through said valve means when pumping high viscosity fluid, said valve means integrally formed in an upper head of a first pumping member and configured to receive the subject fluid and direct it in a substantially upward path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source through said value means;
- and
- further actuating said first pumping member to dispense the subject fluid upwardly from said first pumping member through filtering means.
A method for dispensing fluid from a pumphead having a valve integrally formed therein, including the steps of:
- providing a first valve actuation that allows for receipt of the subject fluid from a source;
- actuating said pumphead to draw the subject fluid from the source;
- providing a second valve actuation that allows the subject fluid to be directed in an upward fashion;
- and
- further actuating said pumphead to dispense the subject fluid upwardly from a substantially uppermost region of said pumphead, said pumphead comprising surfaces that are substantially non-contaminating to the subject fluid.
A method for dispensing fluid from a pumphead having valve means integrally formed therein, including the steps of:
- actuating said valve means to allow for receipt of the subject fluid from a source;
- actuating said pumphead to draw the subject fluid through said valve means;
- actuating said valve means to allow the subject fluid to be directed in an upward fashion;
- and
- actuating said pumphead to dispense the subject fluid upwardly from a substantially uppermost region of said pumphead, said pumphead comprising surfaces that are substantially non-contaminating to the subject fluid.
A method for dispensing fluid, including the steps of:
- providing a valve means integrally formed in an upper head of a first pumping member, said valve means actuated independently of said first pumping member, said valve means configured to receive the subject fluid and direct it in a substantially upward path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source;
- and
- further actuating said first pumping member to dispense the subject fluid upwardly from said first pumping member.
A method for dispensing fluid, including the steps of:
- providing a valve means integrally formed in an upper head of a first pumping member, said valve means configured to receive the subject fluid and direct it in a substantially upward path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source;
- and
- further actuating said first pumping member to dispense the subject fluid upwardly from said first pumping member;
- wherein said first pumping member is actuated independently of said valve means.
A method for dispensing fluid, including the steps of;
- providing a valve means integrally formed in an upper head of a first pumping member, said valve means configured to receive the subject fluid and direct it in a substantially upward path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source;
- and
- further actuating said first pumping member to dispense the subject fluid upwardly from said first pumping member;
- wherein said valve means and said first pumping member are each actuated independently of each other.
A method for dispensing fluid, including the steps of:
- providing a valve means integrally formed in an upper head of a first pumping member, said valve means configured to receive the subject fluid and direct it in a substantially upward path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source;
- and
- further actuating said first pumping member to dispense the subject fluid substantially directly upwardly from said first pumping member.
A method for dispensing fluid, including the steps of:
- providing a valve means integrally formed in an upper head of a first pumping member, said valve means configured to receive the subject fluid and direct it in a substantially upward flow path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source;
- and
- further actuating said first pumping member to dispense the subject fluid upwardly from a substantially uppermost region of said first pumping region;
- said upper head comprising surfaces that are substantially non-contaminating to the subject fluid.
A method for dispensing fluid, including the steps of:
- providing a non-contaminating high-flow valve means adapted to control excessive pressure or pressure drop through said valve means when pumping high viscosity fluid, said valve means integrally formed in an upper head of a first pumping member and configured to receive the subject fluid and direct it in a substantially upward path from said first pumping member;
- actuating said first pumping member to draw the subject fluid from a source;
- and
- further actuating said first pumping member to dispense the subject fluid upwardly from a substantially uppermost region of said first pumping member.
Dependencies are inferred from the claim text.