Manufacturing method and manufacturing apparatus of image displaying apparatus

A manufacturing method of an image displaying apparatus comprising steps of conveying at least one panel member for composing a panel of the image displaying apparatus consecutively into a plurality of depressurized chambers equipped with temperature control means respectively, subjecting to a plurality of processings said at least one panel member while controlling temperatures and forming the panel by sealing plural panel members,

• wherein said plurality of processing chambers include a bake processing chamber for bake processing of said at least one panel member, a surface clean processing chamber for surface clean processing of said at least one panel member into which said at least one panel member is conveyed after said bake processing, a first getter processing chamber into which said at least one panel member is conveyed after said surface clean processing for a getter processing of said processing chamber and a second getter processing chamber into which said at least one panel member is conveyed after said getter processing for the getter processing of said at least one panel member and which is adjacent to said first getter processing chamber, and the getter processing of said at least one panel member is performed with said at least one panel member in said second getter processing chamber set at a temperature lower than a temperature of said at least one panel member subjected to the bake processing in said bake processing chamber.

A manufacturing method of an image displaying apparatus comprising steps of conveying at least one panel member for composing a panel of the image displaying apparatus consecutively into a plurality of depressurized chambers equipped with temperature control means respectively, subjecting to a plurality of processings said at least one panel member while controlling temperatures and forming the panel by sealing said plural panel members,

• wherein said plurality of processing chambers comprise:
• a bake processing chamber for a bake processing of said at least one panel member;
• a cool processing chamber for cooling said at least one panel member into which said at least one panel member is conveyed after said bake processing;
• a first getter processing chamber for a getter processing of an interior of said getter processing chamber into which said at least one panel member is conveyed after said cool processing;
• and
• a second getter processing chamber for the getter processing of said at least one panel member into which said at least one panel member is conveyed after said getter processing and which is adjacent to said first getter processing chamber.

A manufacturing method of an image displaying apparatus comprising steps of conveying at least one panel member for composing a panel of the image displaying apparatus consecutively into a plurality of depressurized processing chambers equipped with temperature control means respectively, subjecting to a plurality of processings said at least one panel member while controlling temperature and forming the panel by sealing plural panel members,

• wherein said plurality of processing chamber include:
• a bake processing chamber for a bake processing of said at least one panel member;
• a cool processing chamber for cooling said at least one panel member into which said at least one panel member is conveyed after said bake processing;
• a surface clean processing chamber for a surface clean processing of said at least one panel member into which said at least one panel member is conveyed after said cool processing;
• a first getter processing chamber for a getter processing of an interior of said processing chamber into which said at least one panel member is conveyed after said surface clean processing;
• and
• a second getter processing chamber adjacent to said first getter processing chamber for the getter processing of said at least one panel member into which said at least one panel member is conveyed after said getter processing.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere, and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a cool processing chamber filled with the depressurized atmosphere for cooling;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere for a getter processing of said member or either or both of said members;
• and
• d:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere and performing a surface clean processing of said member or either or both of said members;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere, and performing a getter processing of said member or either or both of said members;
• and
• d:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere and heating for sealing.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized chamber and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere and performing a surface clean processing of said member or either or both of said members;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a first getter processing chamber filled with the depressurized atmosphere and performing a getter processing of an interior of said first getter processing chamber;
• d:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a second getter processing chamber filled with the depressurized atmosphere and performing the getter processing of said member or either or both of the said members;
• and
• e:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere and heating for sealing.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a cool processing chamber filled with the depressurized atmosphere and performing a cool processing;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere, and performing a surface clean processing of said member or either or both of said members;
• d:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere and performing a getter processing of said member or either or both of said members;
• and
• e:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere and heating for sealing.

A manufacturing method of an image displaying apparatus, comprising the steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed, and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a cool processing chamber filled with the depressurized atmosphere, and performing a cool processing;
• c:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a surface clean processing chamber filled with the depressurized atmosphere, and performing a surface clean processing of said member or either or both of said members;
• d:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a first getter processing chamber filled with the depressurized atmosphere, and performing a getter processing of an interior of said first getter processing chamber;
• e:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a second getter processing chamber filled with the depressurized atmosphere, and performing the getter processing of said member or either or both of said members;
• and
• f:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere.

A manufacturing method of an image displaying apparatus comprising steps of:

• a:
• conveying a first member including a substrate on which phosphor exciting means is disposed and a second member including a substrate on which a phosphor is disposed into a bake processing chamber filled with a depressurized atmosphere and heating for a bake processing;
• b:
• conveying either or both of said first member and said second member through a depressurized atmosphere into a getter processing chamber filled with the depressurized atmosphere and performing a getter processing of said member or either or both of said members;
• and
• c:
• conveying said first member and said second member through a depressurized atmosphere into a seal processing chamber filled with the depressurized atmosphere, and heating for sealing, wherein a temperature of a member subjected to the getter processing at said step b is lower than a heating temperature at said step a.