Transfer module and cluster system for semiconductor manufacturing process

A cluster system comprising:

• at least one process module defining a process chamber, the process module being constructed and arranged to apply a predetermined process to an object to be processed in the process chamber;
• at least one load lock module defining a load lock chamber, the load lock chamber having a substantially rectangular cross section;
• and
• a transfer module defining a transfer chamber, the transfer module transferring the object between the transfer chamber and each of the process chamber and the load lock chamber,
• wherein the transfer module comprises:
• a housing defining the transfer chamber, the housing being constructed and arranged so that a plurality of the housings are connectable to each other;
• a movable part constructed and arranged to be tracklessly movable along a base surface provided in the housing so that the movable part is tracklessly movable within the transfer chamber;
• a transfer part provided on the movable part, the transfer part holding the object to be processed and being movable between the transfer chamber and the process chamber;
• a trackless drive mechanism driving the movable part;
• and
• a control unit controlling motion of the movable part.