Method for integrally detecting leaks in test pieces with relatively thin walls
AssigneeInficon GmbH
InventorsMarkus Nothhelfer, Rudi Widt
Life of this patent
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Abstract
The invention relates to a method for the integral leak detection on test samples with relatively thin walls, in which the test sample (1) comprising the test gas is tested for leaks in a test chamber; in order to test whether or not test samples are properly filled with test gas, it is proposed that for checking the test gas concentration in the test samples (1), the test gas concentration in at least one of the test samples (1) is measured thereby that its wall (2) is provided with a leak (4), and that with this test sample (1) a leak detection process is carried out.
Claims5
Method for the integral leak detection on test samples with relatively thin walls, in which the test samples (1) comprising test gas are tested for leaks in a test chamber, characterized in that for checking the test gas concentration in the test samples (1), the test gas concentration in at least one of the test samples (1) is measured thereby that its wall (2) is provided with a leak (4), with a known loss rate and that with this test sample (1) a leak detection process is carried out wherein said test sample, which serves for checking the test gas concentration, is a test sample which in a preceding leak detection process has been found to be impermeable.
Dependencies are inferred from the claim text.