Permeable protective coating for a single-chip hydrogen sensor
AssigneeHoneywell International Inc.
InventorsJames M. O'Connor, Thomas C. Loughran
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Abstract
A permeable protective coating for a single-ship hydrogen sensor. A hydrogen-permeable coating is applied to a semiconductor wafer containing hydrogen sensor dies, prior to dicing of the wafer. The permeable coating is preferably an organic spin-on polymer, and the hydrogen sensors preferably include hydrogen-sensing elements composed of a palladium nickel alloy.
Claims13
A semiconductor wafer including a plurality of hydrogen sensors, said wafer comprising a hydrogen-permeable organic polymer coating disposed over the plurality of hydrogen sensors.
A robust hydrogen sensor, comprising in combination:
- a silicon base portion;
- at least one hydrogen-sensing element disposed on the silicon base portion;
- and
- a hydrogen-permeable organic polymer coating disposed over the at least one hydrogen-sensing element.
The robust hydrogen sensor of claim 13, wherein the hydrogen-permeable organic polymer coating is an organic spin-on polymer.
Dependencies are inferred from the claim text.